Assignee
DORSEY GAGE INC
US·3 granted patents·67 citations·filing 1997–1999
Top patents by PatentIndex Score
3 records- 0171US6268994B1Electrostatic chuck and method of manufactureDORSEY GAGE INC·Filed 1999·Granted Jul 31, 2001·44 cites·6 claims
- 0249US5905626AElectrostatic chuck with ceramic pole protectionDORSEY GAGE INC·Filed 1998·Granted May 18, 1999·16 cites·6 claims
- 0337US5901030AElectrostatic chuck employing thermoelectric coolingDORSEY GAGE INC·Filed 1997·Granted May 4, 1999·7 cites·2 claims
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