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DUBOUST ALAIN

US2 patents

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US8066552B2Nov 29, 2011

Multi-layer polishing pad for low-pressure polishing

DUBOUST ALAIN10 citations82

US8694144B2Apr 8, 2014

Endpoint control of multiple substrates of varying thickness on the same platen in chemical mechanical polishing

DUBOUST ALAIN2 citations59