Assignee
DUPONT PHOTOMASKS INC
US·37 granted patents·4 pending applications·1,319 citations·filing 1993–2004
Top patents by PatentIndex Score
41 records- 0196US6904582B1Photomask for reducing power supply voltage fluctuations in an integrated circuit and integrated circuit manufactured with the sameDUPONT PHOTOMASKS INC·Filed 2003·Granted Jun 7, 2005·220 cites·23 claims
- 0296US6877144B1System and method for generating a mask layout file to reduce power supply voltage fluctuations in an integrated circuitDUPONT PHOTOMASKS INC·Filed 2003·Granted Apr 5, 2005·257 cites·26 claims
- 0390US6911283B1Method and apparatus for coupling a pellicle to a photomask using a non-distorting mechanismDUPONT PHOTOMASKS INC·Filed 2002·Granted Jun 28, 2005·34 cites·32 claims
- 0490US6721695B1Method and apparatus for evaluating the runability of a photomask inspection toolDUPONT PHOTOMASKS INC·Filed 2001·Granted Apr 13, 2004·55 cites·10 claims
- 0589US6841312B1Method and apparatus for coupling a pellicle assembly to a photomaskDUPONT PHOTOMASKS INC·Filed 2002·Granted Jan 11, 2005·33 cites·23 claims
- 0689US6703170B1Method and apparatus for reducing loading effects on a semiconductor manufacturing component during an etch processDUPONT PHOTOMASKS INC·Filed 2001·Granted Mar 9, 2004·191 cites·22 claims
- 0788US6841309B1Damage resistant photomask constructionDUPONT PHOTOMASKS INC·Filed 2002·Granted Jan 11, 2005·45 cites·22 claims
- 0887US6596444B2Photomask and method for correcting feature size errors on the sameDUPONT PHOTOMASKS INC·Filed 2001·Granted Jul 22, 2003·32 cites·26 claims
- 0985US6782524B2Photomask and integrated circuit manufactured by automatically correcting design rule violations in a mask layout fileDUPONT PHOTOMASKS INC·Filed 2002·Granted Aug 24, 2004·33 cites·20 claims
- 1082US6622295B1Network-based photomask data entry interface and instruction generator for manufacturing photomasksDUPONT PHOTOMASKS INC·Filed 2000·Granted Sep 16, 2003·40 cites·24 claims
- 1180US6894766B1Method for constructing a photomask assembly using an encoded markDUPONT PHOTOMASKS INC·Filed 2002·Granted May 17, 2005·24 cites·18 claims
- 1278US6782516B2System and method for eliminating design rule violations during construction of a mask layout blockDUPONT PHOTOMASKS INC·Filed 2002·Granted Aug 24, 2004·27 cites·29 claims
- 1377US5976307AMethod and apparatus for removing a pellicle frame from a photomask plateDUPONT PHOTOMASKS INC·Filed 1998·Granted Nov 2, 1999·37 cites·20 claims
- 1476US6803158B1Photomask and method for forming an opaque border on the sameDUPONT PHOTOMASKS INC·Filed 2002·Granted Oct 12, 2004·15 cites·21 claims
- 1574US6780548B1Alternating aperture phase shifting photomask with improved transmission balancingDUPONT PHOTOMASKS INC·Filed 2002·Granted Aug 24, 2004·13 cites·24 claims
- 1674US6482557B1Method and apparatus for evaluating the runability of a photomask inspection toolDUPONT PHOTOMASKS INC·Filed 2000·Granted Nov 19, 2002·14 cites·12 claims
- 1773US6103427APressure relieving pellicleDUPONT PHOTOMASKS INC·Filed 1993·Granted Aug 15, 2000·30 cites·18 claims
- 1872US6759171B1Alternating aperture phase shifting photomask with improved intensity balancingDUPONT PHOTOMASKS INC·Filed 2002·Granted Jul 6, 2004·11 cites·20 claims
- 1970US7101645B1Reflective mask for short wavelength lithographyDUPONT PHOTOMASKS INC·Filed 2003·Granted Sep 5, 2006·12 cites·18 claims
- 2070US6893780B1Photomask and method for reducing electrostatic discharge on the same with an ESD protection patternDUPONT PHOTOMASKS INC·Filed 2002·Granted May 17, 2005·16 cites·21 claims
- 2168US6833222B1Method and apparatus for trimming a pellicle film using a laserDUPONT PHOTOMASKS INC·Filed 2002·Granted Dec 21, 2004·17 cites·19 claims
- 2268US6782517B2Photomask and integrated circuit manufactured by automatically eliminating design rule violations during construction of a mask layout blockDUPONT PHOTOMASKS INC·Filed 2002·Granted Aug 24, 2004·14 cites·26 claims
- 2368US6736386B1Covered photomask holder and method of using the sameDUPONT PHOTOMASKS INC·Filed 2002·Granted May 18, 2004·14 cites·21 claims
- 2467US6907587B2System and method for correcting connectivity errors in a mask layout fileDUPONT PHOTOMASKS INC·Filed 2002·Granted Jun 14, 2005·15 cites·22 claims
- 2567US6850858B1Method and apparatus for calibrating a metrology toolDUPONT PHOTOMASKS INC·Filed 2002·Granted Feb 1, 2005·15 cites·23 claims
- 2665US6899981B1Photomask and method for detecting violations in a mask pattern file using a manufacturing ruleDUPONT PHOTOMASKS INC·Filed 2002·Granted May 31, 2005·12 cites·25 claims
- 2764US6288406B1Electron beam lithography system having variable writing speedDUPONT PHOTOMASKS INC·Filed 1999·Granted Sep 11, 2001·19 cites·14 claims
- 2862US6861181B1Photomask and method for evaluating an initial calibration for a scanning electron microscopeDUPONT PHOTOMASKS INC·Filed 2002·Granted Mar 1, 2005·16 cites·30 claims
- 2962US6660540B2Test wafer and method for investigating electrostatic discharge induced wafer defectsDUPONT PHOTOMASKS INC·Filed 2002·Granted Dec 9, 2003·8 cites·28 claims
- 3060US6803160B2Multi-tone photomask and method for manufacturing the sameDUPONT PHOTOMASKS INC·Filed 2002·Granted Oct 12, 2004·7 cites·25 claims
- 3160US6280885B1Dust cover comprising anti-reflective coatingDUPONT PHOTOMASKS INC·Filed 1999·Granted Aug 28, 2001·14 cites·8 claims
- 3258US6376264B1Test photomask and method for investigating ESD-induced reticle defectsDUPONT PHOTOMASKS INC·Filed 2000·Granted Apr 23, 2002·5 cites·21 claims
- 3353US6941006B1Method and system for calibrating the scan amplitude of an electron beam lithography instrumentDUPONT PHOTOMASKS INC·Filed 1999·Granted Sep 6, 2005·11 cites·5 claims
- 3453US2004054633A1Method and system for electronic order entry and automatic processing of photomask ordersDUPONT PHOTOMASKS INC·Filed 2003·Application pending·0 cites
- 3549US6596552B2Test photomask and method for investigating ESD-induced reticle defectsDUPONT PHOTOMASKS INC·Filed 2001·Granted Jul 22, 2003·2 cites·11 claims
- 3649US6278124B1Electron beam blanking method and system for electron beam lithographic processingDUPONT PHOTOMASKS INC·Filed 1999·Granted Aug 21, 2001·10 cites·11 claims
- 3748US6582859B2Dust cover for use in semiconductor fabricationDUPONT PHOTOMASKS INC·Filed 2001·Granted Jun 24, 2003·1 cites·20 claims
- 3840US6586159B2Method for using a coated fluoropolymer substrate pellicle in semiconductor fabricationDUPONT PHOTOMASKS INC·Filed 2001·Granted Jul 1, 2003·0 cites·20 claims
- 3935US2005005256A1Photomask and integrated circuit manufactured by automatically correcting design rule violations in a mask layout fileDUPONT PHOTOMASKS INC·Filed 2004·Application pending·0 cites
- 4032US2002144230A1System and method for correcting design rule violations in a mask layout fileDUPONT PHOTOMASKS INC·Filed 2002·Application pending·0 cites
- 4132US2003228529A1Photomask and method for repairing defectsDUPONT PHOTOMASKS INC·Filed 2003·Application pending·0 cites
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