Assignee
DYNAMIC MICRO SYSTEMS
DE8 patents
Top patents by PatentIndex Score
US9064687B2Jun 23, 2015
Substrate carrier having drip edge configurations
DYNAMIC MICRO SYSTEMS10 citations84
US9880817B2Jan 30, 2018
Tool compiler
DYNAMIC MICRO SYSTEMS8 citations79
US9728436B2Aug 8, 2017
Transfer mechanism with multiple wafer handling capability
DYNAMIC MICRO SYSTEMS5 citations71
US9943969B2Apr 17, 2018
Clean transfer robot
DYNAMIC MICRO SYSTEMS5 citations69
US7751919B2Jul 6, 2010
Method for operating equipment using buffer station having emergency access
DYNAMIC MICRO SYSTEMS3 citations62
US10672633B2Jun 2, 2020
Removable compartments for workpiece stocker
DYNAMIC MICRO SYSTEMS0 citations52
US10643878B2May 5, 2020
Removable compartments for workpiece stocker
DYNAMIC MICRO SYSTEMS0 citations52
US9919871B2Mar 20, 2018
Buffer station for stocker system
DYNAMIC MICRO SYSTEMS0 citations52