Assignee
EBIHARA AKIMITSU
JP·11 granted patents·1 pending application·20 citations·filing 2006–2012
Top patents by PatentIndex Score
12 records- 0193US8767172B2Projection optical device and exposure apparatusEBIHARA AKIMITSU·Filed 2010·Granted Jul 1, 2014·8 cites·39 claims
- 0291US8436979B2Exposure apparatus, and device manufacturing methodEBIHARA AKIMITSU·Filed 2010·Granted May 7, 2013·7 cites·48 claims
- 0379US8681314B2Stage device and coordinate correction method for the same, exposure apparatus, and device manufacturing methodEBIHARA AKIMITSU·Filed 2006·Granted Mar 25, 2014·5 cites·26 claims
- 0469US8830445B2Exposure apparatus, and device manufacturing methodEBIHARA AKIMITSU·Filed 2012·Granted Sep 9, 2014·0 cites·23 claims
- 0560US8767177B2Exposure apparatus, and device manufacturing methodEBIHARA AKIMITSU·Filed 2011·Granted Jul 1, 2014·0 cites·18 claims
- 0659US8319941B2Exposure apparatus, and device manufacturing methodEBIHARA AKIMITSU·Filed 2009·Granted Nov 27, 2012·0 cites·13 claims
- 0758US8705001B2Exposure apparatus, and device manufacturing methodEBIHARA AKIMITSU·Filed 2010·Granted Apr 22, 2014·0 cites·48 claims
- 0856US8436978B2Exposure apparatus, and device manufacturing methodEBIHARA AKIMITSU·Filed 2007·Granted May 7, 2013·0 cites·23 claims
- 0951US8436981B2Exposing method, exposure apparatus, and device fabricating methodEBIHARA AKIMITSU·Filed 2009·Granted May 7, 2013·0 cites·27 claims
- 1048US8674586B2Motor device, apparatus and driving method for rotorEBIHARA AKIMITSU·Filed 2009·Granted Mar 18, 2014·0 cites·49 claims
- 1146US8953148B2Exposure apparatus and making method thereofEBIHARA AKIMITSU·Filed 2006·Granted Feb 10, 2015·0 cites·52 claims
- 1240US2012127445A1Isolation system for an optical element of an exposure apparatusEBIHARA AKIMITSU·Filed 2010·Application pending·0 cites
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