Assignee
ECLIPSE ION TECHNOLOGY INC
US·3 granted patents·153 citations·filing 1986–1988
Top patents by PatentIndex Score
3 records- 0195US4726689ALinear gas bearing with integral vacuum seal for use in serial process ion implantation equipmentECLIPSE ION TECHNOLOGY INC·Filed 1986·Granted Feb 23, 1988·104 cites·10 claims
- 0282US4745281AIon beam fast parallel scanning having dipole magnetic lens with nonuniform fieldECLIPSE ION TECHNOLOGY INC·Filed 1986·Granted May 17, 1988·29 cites·11 claims
- 0353US4836233AMethod and apparatus for venting vacuum processing equipmentECLIPSE ION TECHNOLOGY INC·Filed 1988·Granted Jun 6, 1989·20 cites·16 claims
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