Assignee
EKISHO SENTAN KK
JP·3 granted patents·1 pending application·25 citations·filing 2003–2007
Top patents by PatentIndex Score
4 records- 0178US7345746B2Method of and apparatus for in-situ monitoring of crystallization stateEKISHO SENTAN KK·Filed 2006·Granted Mar 18, 2008·6 cites·15 claims
- 0275US7102750B2Method of in-situ monitoring of crystallization stateEKISHO SENTAN KK·Filed 2003·Granted Sep 5, 2006·17 cites·15 claims
- 0351US2009029507A1Dielectric film, its formation method, semiconductor device using the dielectric film and its production methodEKISHO SENTAN KK·Filed 2007·Application pending·0 cites
- 0448US6816231B2Method and apparatus for exposureEKISHO SENTAN KK·Filed 2003·Granted Nov 9, 2004·2 cites·20 claims
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