Assignee

ELECTRON BEAM MICROFABRICATION

1 granted patent·376 citations·filing 1975–1975

Technology mixH01J1 H10P1

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0197US3983401AMethod and apparatus for target support in electron projection systemsELECTRON BEAM MICROFABRICATION·Filed 1975·Granted Sep 28, 1976·376 cites·14 claims

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