Assignee
ELIONIX INC
JP3 patents
Top patents by PatentIndex Score
US6605811B2Aug 12, 2003
Electron beam lithography system and method
ELIONIX INC18 citations77
US9410984B2Aug 9, 2016
Surface force measuring method and surface force measuring apparatus
ELIONIX INC2 citations54
US4554452ANov 19, 1985
Method and apparatus for handling charged particle beam
ELIONIX INC5 citations45