Assignee
ENDO RICK
US9 patents
Top patents by PatentIndex Score
US8770143B2Jul 8, 2014
Multi-region processing system
ENDO RICK19 citations92
US8932995B2Jan 13, 2015
Combinatorial process system
ENDO RICK1 citations62
US8771483B2Jul 8, 2014
Combinatorial process system
ENDO RICK2 citations62
US8449678B2May 28, 2013
Combinatorial process system
ENDO RICK2 citations62
US8387563B2Mar 5, 2013
Combinatorial process system
ENDO RICK1 citations62
US8317925B2Nov 27, 2012
Method and system for mask handling in high productivity chamber
ENDO RICK2 citations61
US8486821B1Jul 16, 2013
Method and apparatus for variable conductance
ENDO RICK2 citations60
US8216376B1Jul 10, 2012
Method and apparatus for variable conductance
ENDO RICK3 citations60
US8758581B2Jun 24, 2014
Combinatorial process system
ENDO RICK0 citations51