Assignee
ENDO TETSUYA
JP·5 granted patents·2 pending applications·18 citations·filing 2010–2012
Top patents by PatentIndex Score
7 records- 0188US9058962B2Magnet unit and magnetron sputtering apparatusENDO TETSUYA·Filed 2011·Granted Jun 16, 2015·9 cites·4 claims
- 0283US8776542B2Cooling systemENDO TETSUYA·Filed 2010·Granted Jul 15, 2014·6 cites·12 claims
- 0374US8673124B2Magnet unit and magnetron sputtering apparatusENDO TETSUYA·Filed 2011·Granted Mar 18, 2014·3 cites·9 claims
- 0451US9299544B2Sputtering apparatusENDO TETSUYA·Filed 2011·Granted Mar 29, 2016·0 cites·9 claims
- 0551US2012247952A1Film forming method by sputtering apparatus and sputtering apparatusENDO TETSUYA·Filed 2012·Application pending·0 cites
- 0646US8778150B2Magnetron sputtering cathode, magnetron sputtering apparatus, and method of manufacturing magnetic deviceENDO TETSUYA·Filed 2010·Granted Jul 15, 2014·0 cites·15 claims
- 0739US2012193216A1Substrate cooling device, sputtering apparatus and method for manufacturing electronic deviceENDO TETSUYA·Filed 2012·Application pending·0 cites
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