Assignee
ENDOH SHOSUKE
JP·2 granted patents·1 pending application·20 citations·filing 2010–2011
Top patents by PatentIndex Score
3 records- 0188US8124539B2Plasma processing apparatus, focus ring, and susceptorENDOH SHOSUKE·Filed 2010·Granted Feb 28, 2012·12 cites·14 claims
- 0286US8114247B2Plasma processing apparatus and focus ringENDOH SHOSUKE·Filed 2010·Granted Feb 14, 2012·8 cites·5 claims
- 0350US2012037314A1Substrate processing apparatus and side wall componentENDOH SHOSUKE·Filed 2011·Application pending·0 cites
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