Assignee

ENGELHART WOLFGANG

DE·1 granted patent·2 citations·filing 2011–2011

Technology mixB32B1 C23C1 Y10T1

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0173US8980446B2PVD hybrid method for depositing mixed crystal layersENGELHART WOLFGANG·Filed 2011·Granted Mar 17, 2015·2 cites·14 claims

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