Assignee
EPICHEM LTD
US4 patents
Top patents by PatentIndex Score
US6698728B1Mar 2, 2004
Method and apparatus for delivering precursors to a plurality of epitaxial reactor sites
EPICHEM LTD39 citations89
US6495707B1Dec 17, 2002
Process and apparatus for production of organometallic compounds
EPICHEM LTD46 citations84
US5830530ANov 3, 1998
Chemical vapor deposition of tin oxide films
EPICHEM LTD5 citations62
US7100441B2Sep 5, 2006
Method and apparatus for monitoring liquid levels within a vessel
EPICHEM LTD6 citations58