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ERNUR DIDEM
BE
2 patents
Top patents
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US8080505B2
Dec 20, 2011
Slurry composition and method for chemical mechanical polishing of copper integrated with tungsten based barrier metals
ERNUR DIDEM
7 citations
75
US8722527B2
May 13, 2014
Integrated circuit manufacturing method and integrated circuit
ERNUR DIDEM
0 citations
45