Individual holder
ERSHOV ALEXANDER I
US·7 granted patents·48 citations·filing 2010–2012
Individually held — no corporate assignee on record.
Top patents by PatentIndex Score
7 records- 0193US8604452B2Drive laser delivery systems for EUV light sourceERSHOV ALEXANDER I·Filed 2011·Granted Dec 10, 2013·13 cites·20 claims
- 0292US8170078B2Laser systemERSHOV ALEXANDER I·Filed 2011·Granted May 1, 2012·11 cites·20 claims
- 0391US8461560B2LPP EUV light source drive laser systemERSHOV ALEXANDER I·Filed 2011·Granted Jun 11, 2013·9 cites·24 claims
- 0489US8908735B2Laser systemERSHOV ALEXANDER I·Filed 2011·Granted Dec 9, 2014·7 cites·17 claims
- 0589US8785892B2Laser-produced-plasma EUV light sourceERSHOV ALEXANDER I·Filed 2012·Granted Jul 22, 2014·4 cites·12 claims
- 0669US9066412B2Systems and methods for cooling an opticERSHOV ALEXANDER I·Filed 2010·Granted Jun 23, 2015·3 cites·19 claims
- 0763US8514486B2Drive laser for EUV light sourceERSHOV ALEXANDER I·Filed 2010·Granted Aug 20, 2013·1 cites·7 claims
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