Assignee
ESOL INC
KR9 patents
Top patents by PatentIndex Score
US11561467B1Jan 24, 2023
Reflectivity and transmittance measuring device of EUV mask and EUV pellicle
ESOL INC5 citations74
US11829064B2Nov 28, 2023
EUV lighting device using multilayer reflection zone plate and manufacturing method thereof
ESOL INC0 citations62
US11817230B1Nov 14, 2023
Device for EUV light source
ESOL INC0 citations62
US11740552B2Aug 29, 2023
Pellicle structure for EUV lithography and manufacturing method therefor
ESOL INC0 citations62
US12332188B2Jun 17, 2025
High-performance EUV microscope with free form illumination system
ESOL INC0 citations51
US12287579B2Apr 29, 2025
High-performance EUV microscope device with free-form illumination system structure having elliptical mirror
ESOL INC0 citations51
US12282144B2Apr 22, 2025
High-performance EUV microscope device with free-form illumination system structure
ESOL INC0 citations51
US12250763B2Mar 11, 2025
EUV light source device and plasma gas recycling system for high-density plasma generation
ESOL INC0 citations51
US11898970B2Feb 13, 2024
EUV mask inspection device using multilayer reflection zone plate
ESOL INC0 citations51