Assignee

ETEC SYSTEM INC

US·2 granted patents·38 citations·filing 1991–1996

Technology mixC23C1 G02B1 G03F1

Top patents by PatentIndex Score

2 records

0166US5781346AMagnification correction for small field scanningETEC SYSTEM INC·Filed 1996·Granted Jul 14, 1998·22 cites·6 claims
0250US5209402ALaminar flow gas diffuserETEC SYSTEM INC·Filed 1991·Granted May 11, 1993·16 cites·14 claims

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