Assignee
ETO HIDEO
JP·5 granted patents·3 pending applications·28 citations·filing 2011–2012
Top patents by PatentIndex Score
8 records- 0192US8833388B2Pressure controlling apparatusETO HIDEO·Filed 2012·Granted Sep 16, 2014·19 cites·15 claims
- 0284US9236229B2Gas supply member, plasma treatment method, and method of forming yttria-containing filmETO HIDEO·Filed 2011·Granted Jan 12, 2016·8 cites·15 claims
- 0358US8689623B2Flow sensor, mass flow controller, and method for manufacturing flow sensorETO HIDEO·Filed 2012·Granted Apr 8, 2014·1 cites·8 claims
- 0449US2012040132A1Protective film, method for forming the same, semiconductor manufacturing apparatus, and plasma treatment apparatusETO HIDEO·Filed 2011·Application pending·0 cites
- 0546US8760053B2Power supply control device, plasma processing device, and plasma processing methodETO HIDEO·Filed 2011·Granted Jun 24, 2014·0 cites·20 claims
- 0639US2012000887A1Plasma treatment apparatus and plasma treatment methodETO HIDEO·Filed 2011·Application pending·0 cites
- 0738US8651135B2Mass flow controller, mass flow controller system, substrate processing device, and gas flow rate adjusting methodETO HIDEO·Filed 2011·Granted Feb 18, 2014·0 cites·7 claims
- 0838US2012216955A1Plasma processing apparatusETO HIDEO·Filed 2012·Application pending·0 cites
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