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EUGENUS INC
US18 patents
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US11832537B2Nov 28, 2023
Titanium silicon nitride barrier layer
EUGENUS INC3 citations71
US11587784B2Feb 21, 2023
Smooth titanium nitride layers and methods of forming the same
EUGENUS INC3 citations71
US11482413B2Oct 25, 2022
Conformal and smooth titanium nitride layers and methods of forming the same
EUGENUS INC5 citations71
US12165918B2Dec 10, 2024
Conformal titanium nitride-based thin films and methods of forming same
EUGENUS INC2 citations70
US11361992B2Jun 14, 2022
Conformal titanium nitride-based thin films and methods of forming same
EUGENUS INC3 citations70
US11942365B2Mar 26, 2024
Multi-region diffusion barrier containing titanium, silicon and nitrogen
EUGENUS INC2 citations69
US11401607B2Aug 2, 2022
TiSiN coating method
EUGENUS INC2 citations67
US12308226B2May 20, 2025
Conformal and smooth titanium nitride layers and methods of forming the same
EUGENUS INC0 citations61
US12029144B2Jul 2, 2024
Encapsulation layer for chalcogenide material
EUGENUS INC0 citations61
US12444603B2Oct 14, 2025
Smooth titanium nitride layers and methods of forming the same
EUGENUS INC0 citations60
US12408569B2Sep 2, 2025
Titanium silicon nitride barrier layer
EUGENUS INC0 citations60
US12444648B2Oct 14, 2025
Conformal titanium silicon nitride-based thin films and methods of forming same
EUGENUS INC1 citations58
US12431388B2Sep 30, 2025
Conformal titanium silicon nitride-based thin films and methods of forming same
EUGENUS INC1 citations58
US12325914B2Jun 10, 2025
Precursor delivery system and method for cyclic deposition
EUGENUS INC1 citations58
US12283486B2Apr 22, 2025
Conformal and smooth titanium nitride layers and methods of forming the same
EUGENUS INC0 citations58
US11328944B2May 10, 2022
Systems and methods of placing substrates in semiconductor manufacturing equipment
EUGENUS INC0 citations49
US12272599B2Apr 8, 2025
Conformal and smooth titanium nitride layers and methods of forming the same
EUGENUS INC0 citations47
US11459654B2Oct 4, 2022
Liquid precursor injection for thin film deposition
EUGENUS INC0 citations47