Assignee
EVATEC AG
CH32 patents
Top patents by PatentIndex Score
US10202682B2Feb 12, 2019
Method of sputtering and sputter system
EVATEC AG12 citations81
US10138553B2Nov 27, 2018
Vacuum treatment apparatus
EVATEC AG12 citations81
US10388559B2Aug 20, 2019
Apparatus for depositing a layer on a substrate in a processing gas
EVATEC AG13 citations80
US11380530B2Jul 5, 2022
Reactive sputtering with HIPIMS
EVATEC AG2 citations71
US10580671B2Mar 3, 2020
Chamber for degassing substrates
EVATEC AG1 citations71
US10403522B2Sep 3, 2019
Chamber for degassing substrates
EVATEC AG2 citations71
US9624572B2Apr 18, 2017
Method of HIPIMS sputtering and HIPIMS sputter system
EVATEC AG2 citations70
US11551950B2Jan 10, 2023
Substrate processing apparatus and method of processing a substrate and of manufacturing a processed workpiece
EVATEC AG2 citations67
US11217434B2Jan 4, 2022
RF capacitive coupled dual frequency etch reactor
EVATEC AG2 citations67
US11776825B2Oct 3, 2023
Chamber for degassing substrates
EVATEC AG2 citations65
US11211234B2Dec 28, 2021
Arc suppression and pulsing in high power impulse magnetron sputtering (HIPIMS)
EVATEC AG0 citations61
US9934992B2Apr 3, 2018
Chamber for degassing substrates
EVATEC AG1 citations61
US11742187B2Aug 29, 2023
RF capacitive coupled etch reactor
EVATEC AG0 citations57
US11469085B2Oct 11, 2022
Vacuum plasma workpiece treatment apparatus
EVATEC AG0 citations57
US12249523B2Mar 11, 2025
Wafer holder and temperature conditioning arrangement and method of manufacturing a wafer
EVATEC AG0 citations55
US11848179B2Dec 19, 2023
Methods of and apparatus for magnetron sputtering
EVATEC AG0 citations52
US11476099B2Oct 18, 2022
Methods of and apparatus for magnetron sputtering
EVATEC AG0 citations52
US12272525B2Apr 8, 2025
Sputtering apparatus for coating of 3D-objects
EVATEC AG0 citations50
US10590538B2Mar 17, 2020
Vacuum treatment apparatus
EVATEC AG0 citations49
US12426506B2Sep 23, 2025
Piezoelectric coating and deposition process
EVATEC AG0 citations48
US11145495B2Oct 12, 2021
Vacuum treatment chamber and method of manufacturing a vacuum treated plate-shaped substrate
EVATEC AG0 citations48
US12595550B2Apr 7, 2026
Vacuum layer deposition apparatus and method of depositing a layer on a substrate, especially on a substrate comprising indentations in the surface to be coated
EVATEC AG0 citations47
US12389797B2Aug 12, 2025
Deposition process for piezoelectric coatings
EVATEC AG0 citations45
US10301125B2May 28, 2019
Transport and handing-over arrangement for disc-shaped substrates, vacuum treatment installation and method for manufacture treated substrates
EVATEC AG0 citations45
US11380520B2Jul 5, 2022
RF power delivery to vacuum plasma processing
EVATEC AG0 citations43
US11377728B2Jul 5, 2022
Broadband optical monitoring
EVATEC AG0 citations42
US11387079B2Jul 12, 2022
Plasma etch chamber and method of plasma etching
EVATEC AG0 citations41
US11952654B2Apr 9, 2024
Liquid sputter target
EVATEC AG0 citations40
US12493016B2Dec 9, 2025
Measuring device and method for measuring parameters of a piezoelectric crystal onto which a thin film of material is deposited as well as thin-film deposition systems with such a device and a method for controlling such systems
EVATEC AG0 citations38
US12211715B2Jan 28, 2025
Substrate vacuum treatment apparatus and method therefor
EVATEC AG0 citations38
US12209302B2Jan 28, 2025
Vacuum system and method to deposit a compound layer
EVATEC AG0 citations35
US10889890B2Jan 12, 2021
Vacuum processing apparatus and method for vacuum processing substrates
EVATEC AG0 citations31