Assignee
EVATEC AG
CH·32 granted patents·29 pending applications·51 citations·filing 2014–2024
Top patents by PatentIndex Score
61 records- 0193US10388559B2Apparatus for depositing a layer on a substrate in a processing gasEVATEC AG·Filed 2016·Granted Aug 20, 2019·13 cites·15 claims
- 0292US10202682B2Method of sputtering and sputter systemEVATEC AG·Filed 2017·Granted Feb 12, 2019·12 cites·24 claims
- 0392US10138553B2Vacuum treatment apparatusEVATEC AG·Filed 2016·Granted Nov 27, 2018·12 cites·17 claims
- 0489US11380530B2Reactive sputtering with HIPIMSEVATEC AG·Filed 2020·Granted Jul 5, 2022·2 cites·23 claims
- 0582US10403522B2Chamber for degassing substratesEVATEC AG·Filed 2018·Granted Sep 3, 2019·2 cites·24 claims
- 0677US11776825B2Chamber for degassing substratesEVATEC AG·Filed 2016·Granted Oct 3, 2023·2 cites·33 claims
- 0777US11217434B2RF capacitive coupled dual frequency etch reactorEVATEC AG·Filed 2017·Granted Jan 4, 2022·2 cites·33 claims
- 0876US10580671B2Chamber for degassing substratesEVATEC AG·Filed 2019·Granted Mar 3, 2020·1 cites·20 claims
- 0972US11551950B2Substrate processing apparatus and method of processing a substrate and of manufacturing a processed workpieceEVATEC AG·Filed 2018·Granted Jan 10, 2023·2 cites·22 claims
- 1071US9624572B2Method of HIPIMS sputtering and HIPIMS sputter systemEVATEC AG·Filed 2014·Granted Apr 18, 2017·2 cites·21 claims
- 1171US2023395402A1Chamber for degassing substratesEVATEC AG·Filed 2023·Application pending·0 cites
- 1270US9934992B2Chamber for degassing substratesEVATEC AG·Filed 2015·Granted Apr 3, 2018·1 cites·24 claims
- 1370US2024186064A1Soft magnetic multilayer desposition apparatus, methods of manufacturing and magnetic multilayerEVATEC AG·Filed 2024·Application pending·0 cites
- 1467US11848179B2Methods of and apparatus for magnetron sputteringEVATEC AG·Filed 2022·Granted Dec 19, 2023·0 cites·31 claims
- 1561US2026015711A1Process to deposit quantized nano layers by magnetron sputteringEVATEC AG·Filed 2023·Application pending·0 cites
- 1660US12595550B2Vacuum layer deposition apparatus and method of depositing a layer on a substrate, especially on a substrate comprising indentations in the surface to be coatedEVATEC AG·Filed 2023·Granted Apr 7, 2026·0 cites·35 claims
- 1759US10590538B2Vacuum treatment apparatusEVATEC AG·Filed 2018·Granted Mar 17, 2020·0 cites·17 claims
- 1858US11211234B2Arc suppression and pulsing in high power impulse magnetron sputtering (HIPIMS)EVATEC AG·Filed 2016·Granted Dec 28, 2021·0 cites·8 claims
- 1954US12272525B2Sputtering apparatus for coating of 3D-objectsEVATEC AG·Filed 2022·Granted Apr 8, 2025·0 cites·21 claims
- 2054US11469085B2Vacuum plasma workpiece treatment apparatusEVATEC AG·Filed 2017·Granted Oct 11, 2022·0 cites·32 claims
- 2153US11742187B2RF capacitive coupled etch reactorEVATEC AG·Filed 2017·Granted Aug 29, 2023·0 cites·34 claims
- 2252US2022396864A1Vacuum process treatment chamber and method of treating a substrate by means of a vacuum treatment processEVATEC AG·Filed 2020·Application pending·0 cites
- 2351US12493016B2Measuring device and method for measuring parameters of a piezoelectric crystal onto which a thin film of material is deposited as well as thin-film deposition systems with such a device and a method for controlling such systemsEVATEC AG·Filed 2021·Granted Dec 9, 2025·0 cites·30 claims
- 2450US11476099B2Methods of and apparatus for magnetron sputteringEVATEC AG·Filed 2018·Granted Oct 18, 2022·0 cites·26 claims
- 2550US2023267760A1Biometric authentication systemEVATEC AG·Filed 2021·Application pending·0 cites
- 2648US2020230643A1Permeation-barrierEVATEC AG·Filed 2018·Application pending·0 cites
- 2748US2020216955A1Permeation-barrierEVATEC AG·Filed 2018·Application pending·0 cites
- 2848US2020203071A1Soft magnetic multilayer desposition apparatus, methods of manufacturing and magnetic multilayerEVATEC AG·Filed 2018·Application pending·0 cites
- 2947US11952654B2Liquid sputter targetEVATEC AG·Filed 2019·Granted Apr 9, 2024·0 cites·29 claims
- 3047US2024347326A1Process shutter arrangementEVATEC AG·Filed 2022·Application pending·0 cites
- 3145US12249523B2Wafer holder and temperature conditioning arrangement and method of manufacturing a waferEVATEC AG·Filed 2017·Granted Mar 11, 2025·0 cites·25 claims
- 3245US2017175247A1Sputtering source arrangement, sputtering system and method of manufacturing metal-coated plate-shaped substratesEVATEC AG·Filed 2014·Application pending·0 cites
- 3345US2017200695A1Apparatus and method for processing a substrateEVATEC AG·Filed 2017·Application pending·0 cites
- 3444US10301125B2Transport and handing-over arrangement for disc-shaped substrates, vacuum treatment installation and method for manufacture treated substratesEVATEC AG·Filed 2017·Granted May 28, 2019·0 cites·15 claims
- 3543US2023097276A1Apparatus and process with a dc-pulsed cathode arrayEVATEC AG·Filed 2021·Application pending·0 cites
- 3640US12426506B2Piezoelectric coating and deposition processEVATEC AG·Filed 2020·Granted Sep 23, 2025·0 cites·28 claims
- 3739US11380520B2RF power delivery to vacuum plasma processingEVATEC AG·Filed 2018·Granted Jul 5, 2022·0 cites·25 claims
- 3839US2019072228A1Adapter for vacuum-insulated linesEVATEC AG·Filed 2018·Application pending·0 cites
- 3938US11377728B2Broadband optical monitoringEVATEC AG·Filed 2017·Granted Jul 5, 2022·0 cites·11 claims
- 4038US2023234094A1Vacuum treatment apparatusEVATEC AG·Filed 2021·Application pending·0 cites
- 4137US2021348274A1Plasma enhanced atomic layer deposition (peald) apparatusEVATEC AG·Filed 2019·Application pending·0 cites
- 4237US2021202282A1Method and apparatus for treating a substrateEVATEC AG·Filed 2018·Application pending·0 cites
- 4337US2024068099A1Substrate processing apparatus for temperature measurement of a moving substrate and method of measuring the temperature of a moving substrateEVATEC AG·Filed 2022·Application pending·0 cites
- 4436US11145495B2Vacuum treatment chamber and method of manufacturing a vacuum treated plate-shaped substrateEVATEC AG·Filed 2017·Granted Oct 12, 2021·0 cites·20 claims
- 4535US12389797B2Deposition process for piezoelectric coatingsEVATEC AG·Filed 2019·Granted Aug 12, 2025·0 cites·20 claims
- 4635US2023002879A1Gas ring for a pvd sourceEVATEC AG·Filed 2020·Application pending·0 cites
- 4735US2021381100A1Vacuum treatment apparatus and method of vacuum treating substratesEVATEC AG·Filed 2019·Application pending·0 cites
- 4835US2021319984A1Method and aparatus for low particle plasma etchingEVATEC AG·Filed 2019·Application pending·0 cites
- 4934US2024063051A1Substrate support unit, and apparatus and method for depositing a layer using the sameEVATEC AG·Filed 2020·Application pending·0 cites
- 5033US12211715B2Substrate vacuum treatment apparatus and method thereforEVATEC AG·Filed 2019·Granted Jan 28, 2025·0 cites·30 claims
Showing the top 50 of 61 patent records by PatentIndex Score.
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