Assignee
FABCENTRIC INC
US·2 granted patents·137 citations·filing 1999–2002
Top patents by PatentIndex Score
2 records- 0187US6665575B2Recipe editor for editing and creating process recipes with parameter-level security for various kinds of semiconductor-manufacturing equipmentFABCENTRIC INC·Filed 2002·Granted Dec 16, 2003·37 cites·3 claims
- 0284US6415193B1Recipe editor for editing and creating process recipes with parameter-level semiconductor-manufacturing equipmentFABCENTRIC INC·Filed 1999·Granted Jul 2, 2002·100 cites·16 claims
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