Assignee
FANG TONG
US·5 granted patents·1 pending application·25 citations·filing 2006–2011
Top patents by PatentIndex Score
6 records- 0184US8398778B2Control of bevel etch film profile using plasma exclusion zone rings larger than the wafer diameterFANG TONG·Filed 2008·Granted Mar 19, 2013·7 cites·11 claims
- 0278US8083890B2Gas modulation to control edge exclusion in a bevel edge etching plasma chamberFANG TONG·Filed 2008·Granted Dec 27, 2011·6 cites·17 claims
- 0376US8086427B2Method and apparatus for the registration of 3D ear impression modelsFANG TONG·Filed 2006·Granted Dec 27, 2011·8 cites·30 claims
- 0469US8323523B2High pressure bevel etch processFANG TONG·Filed 2011·Granted Dec 4, 2012·2 cites·18 claims
- 0567US8262923B2High pressure bevel etch processFANG TONG·Filed 2009·Granted Sep 11, 2012·2 cites·14 claims
- 0652US2009170334A1Copper Discoloration Prevention Following Bevel Etch ProcessFANG TONG·Filed 2008·Application pending·0 cites
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