Assignee
FEI CO
US661 patents
Top patents by PatentIndex Score
US6268608B1Jul 31, 2001
Method and apparatus for selective in-situ etching of inter dielectric layers
FEI CO122 citations99
US6211527B1Apr 3, 2001
Method for device editing
FEI CO143 citations99
US5435850AJul 25, 1995
Gas injection system
FEI CO164 citations99
US7241361B2Jul 10, 2007
Magnetically enhanced, inductively coupled plasma source for a focused ion beam system
FEI CO86 citations98
US7670455B2Mar 2, 2010
Magnetically enhanced, inductively coupled plasma source for a focused ion beam system
FEI CO48 citations97
US6900447B2May 31, 2005
Focused ion beam system with coaxial scanning electron microscope
FEI CO77 citations97
US6889113B2May 3, 2005
Graphical automated machine control and metrology
FEI CO85 citations96
US6497194B1Dec 24, 2002
Focused particle beam systems and methods using a tilt column
FEI CO49 citations96
US6457350B1Oct 1, 2002
Carbon nanotube probe tip grown on a small probe
FEI CO95 citations96
US6373070B1Apr 16, 2002
Method apparatus for a coaxial optical microscope with focused ion beam
FEI CO61 citations96
US5188705AFeb 23, 1993
Method of semiconductor device manufacture
FEI CO145 citations96
US6753538B2Jun 22, 2004
Electron beam processing
FEI CO179 citations95
US6579665B2Jun 17, 2003
Thin-film magnetic recording head manufacture
FEI CO50 citations94
US6504151B1Jan 7, 2003
Wear coating applied to an atomic force probe tip
FEI CO78 citations94
US6414307B1Jul 2, 2002
Method and apparatus for enhancing yield of secondary ions
FEI CO123 citations94
US9934930B2Apr 3, 2018
High aspect ratio x-ray targets and uses of same
FEI CO19 citations93
US9818584B2Nov 14, 2017
Internal split faraday shield for a plasma source
FEI CO21 citations93
US7423263B2Sep 9, 2008
Planar view sample preparation
FEI CO64 citations93
US7103505B2Sep 5, 2006
Defect analyzer
FEI CO45 citations93
US6963068B2Nov 8, 2005
Method for the manufacture and transmissive irradiation of a sample, and particle-optical system
FEI CO72 citations93
US5827786AOct 27, 1998
Charged particle deposition of electrically insulating films
FEI CO91 citations93
US7767979B2Aug 3, 2010
Method for coupling and disconnecting a co-operative composite structure of a sample carrier and a sample holder
FEI CO26 citations92
US7378667B2May 27, 2008
Particle-optical appliance provided with aberration-correcting means
FEI CO21 citations92
US7348556B2Mar 25, 2008
Method of measuring three-dimensional surface roughness of a structure
FEI CO59 citations92
US7317515B2Jan 8, 2008
Method of localizing fluorescent markers
FEI CO29 citations92
US7067820B2Jun 27, 2006
Particle-optical apparatus with a permanent-magnetic lens and an electrostatic lens
FEI CO28 citations92
US6949756B2Sep 27, 2005
Shaped and low density focused ion beams
FEI CO20 citations92
US6946654B2Sep 20, 2005
Collection of secondary electrons through the objective lens of a scanning electron microscope
FEI CO30 citations92
US6693282B1Feb 17, 2004
Particle-optical apparatus including a particle source that can be switched between high brightness and large beam current
FEI CO26 citations92
US6683320B2Jan 27, 2004
Through-the-lens neutralization for charged particle beam system
FEI CO32 citations92
US8912490B2Dec 16, 2014
Method for preparing samples for imaging
FEI CO20 citations91
US7408178B2Aug 5, 2008
Method for the removal of a microscopic sample from a substrate
FEI CO26 citations91
US7308334B2Dec 11, 2007
Graphical automated machine control and metrology
FEI CO27 citations91
US7161159B2Jan 9, 2007
Dual beam system
FEI CO22 citations91
US7064325B2Jun 20, 2006
Apparatus with permanent magnetic lenses
FEI CO20 citations91
US7045275B2May 16, 2006
Thin-film magnetic recording head manufacture
FEI CO18 citations91
US7009187B2Mar 7, 2006
Particle detector suitable for detecting ions and electrons
FEI CO28 citations91
US7005636B2Feb 28, 2006
Method and apparatus for manipulating a microscopic sample
FEI CO32 citations91
US6838380B2Jan 4, 2005
Fabrication of high resistivity structures using focused ion beams
FEI CO37 citations91
US6797953B2Sep 28, 2004
Electron beam system using multiple electron beams
FEI CO38 citations91
US6218664B1Apr 17, 2001
SEM provided with an electrostatic objective and an electrical scanning device
FEI CO48 citations91
US5541411AJul 30, 1996
Image-to-image registration focused ion beam system
FEI CO63 citations91
US5376791ADec 27, 1994
Secondary ion mass spectometry system
FEI CO56 citations91
US9601313B2Mar 21, 2017
Automated TEM sample preparation
FEI CO14 citations90
US8937282B2Jan 20, 2015
Mineral identification using mineral definitions including variability
FEI CO25 citations90
US8890064B2Nov 18, 2014
Method for S/TEM sample analysis
FEI CO12 citations90
US7845245B2Dec 7, 2010
Method for attaching a sample to a manipulator by melting and then freezing part of said sample
FEI CO20 citations90
US7490009B2Feb 10, 2009
Method and system for spectroscopic data analysis
FEI CO26 citations90
US7474986B2Jan 6, 2009
Defect analyzer
FEI CO16 citations90
US7064477B2Jun 20, 2006
Low power schottky emitter
FEI CO16 citations90
Showing the top 50 of 661 patents by PatentIndex Score.