Assignee
FENG HANYING
US4 patents
Top patents by PatentIndex Score
US8918742B2Dec 23, 2014
Methods and systems for pattern design with tailored response to wavefront aberration
FENG HANYING23 citations92
US8893060B2Nov 18, 2014
Optimization of source, mask and projection optics
FENG HANYING18 citations92
US8745551B2Jun 3, 2014
Pattern-independent and hybrid matching/tuning including light manipulation by projection optics
FENG HANYING11 citations83
US8560978B2Oct 15, 2013
Pattern-dependent proximity matching/tuning including light manipulation by projection optics
FENG HANYING15 citations83