Assignee

FERRERA MARCO

IT·1 granted patent·10 citations·filing 2011–2011

Technology mixB01D1 B01L1 B81B1 B81C1 F04B1

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0184US8633553B2Process for manufacturing a micromechanical structure having a buried area provided with a filterFERRERA MARCO·Filed 2011·Granted Jan 21, 2014·10 cites·14 claims

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