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FEURPRIER YANNICK

US2 patents

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US8202803B2Jun 19, 2012

Method to remove capping layer of insulation dielectric in interconnect structures

FEURPRIER YANNICK7 citations81

US8080473B2Dec 20, 2011

Method for metallizing a pattern in a dielectric film

FEURPRIER YANNICK2 citations59