Assignee
FEYH ANDO
US6 patents
Top patents by PatentIndex Score
US9638524B2May 2, 2017
Chip level sensor with multiple degrees of freedom
FEYH ANDO2 citations72
US8212326B2Jul 3, 2012
Manufacturing method for a micromechanical component having a thin-layer capping
FEYH ANDO3 citations62
US8165324B2Apr 24, 2012
Micromechanical component and method for its production
FEYH ANDO5 citations57
US9166066B2Oct 20, 2015
Micromechanical sensor apparatus having a movable gate and corresponding production method
FEYH ANDO0 citations51
US8779533B2Jul 15, 2014
MEMS with single use valve and method of operation
FEYH ANDO0 citations51
US8163585B2Apr 24, 2012
Method for manufacturing a sensor element, and sensor element
FEYH ANDO0 citations51