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FILMETRICS INC
US12 patents
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US6204922B1Mar 20, 2001
Rapid and accurate thin film measurement of individual layers in a multi-layered or patterned sample
FILMETRICS INC216 citations98
US6172756B1Jan 9, 2001
Rapid and accurate end point detection in a noisy environment
FILMETRICS INC188 citations98
US6184985B1Feb 6, 2001
Spectrometer configured to provide simultaneous multiple intensity spectra from independent light sources
FILMETRICS INC68 citations95
US7151609B2Dec 19, 2006
Determining wafer orientation in spectral imaging
FILMETRICS INC30 citations92
US7095511B2Aug 22, 2006
Method and apparatus for high-speed thickness mapping of patterned thin films
FILMETRICS INC21 citations92
US10247605B2Apr 2, 2019
Automatic real-time wavelength calibration of fiber-optic-based spectrometers
FILMETRICS INC3 citations72
US7502119B2Mar 10, 2009
Thin-film metrology using spectral reflectance with an intermediate in-line reference
FILMETRICS INC5 citations62
US11099068B2Aug 24, 2021
Optical instrumentation including a spatially variable filter
FILMETRICS INC0 citations51
US10571615B2Feb 25, 2020
High-lifetime broadband light source for low-power applications
FILMETRICS INC0 citations51
US8908177B2Dec 9, 2014
Correction of second-order diffraction effects in fiber-optic-based spectrometers
FILMETRICS INC1 citations51
US10724900B2Jul 28, 2020
Determining focus condition in spectral reflectance system
FILMETRICS INC0 citations41
US10620420B2Apr 14, 2020
Optical system for use with microscope
FILMETRICS INC0 citations41