Assignee
FORTREND ENGINEERING CORP
US14 patents
Top patents by PatentIndex Score
US5193969AMar 16, 1993
Wafer transfer machine
FORTREND ENGINEERING CORP362 citations96
US5934991AAug 10, 1999
Pod loader interface improved clean air system
FORTREND ENGINEERING CORP59 citations95
US5870488AFeb 9, 1999
Method and apparatus for prealigning wafers in a wafer sorting system
FORTREND ENGINEERING CORP110 citations94
US5706201AJan 6, 1998
Software to determine the position of the center of a wafer
FORTREND ENGINEERING CORP67 citations92
US6494666B2Dec 17, 2002
Simplified and enhanced SCARA arm
FORTREND ENGINEERING CORP42 citations91
US5885045AMar 23, 1999
Integrated wafer pod-load/unload and mass-transfer system
FORTREND ENGINEERING CORP22 citations91
US5984610ANov 16, 1999
Pod loader interface
FORTREND ENGINEERING CORP39 citations90
US6396072B1May 28, 2002
Load port door assembly with integrated wafer mapper
FORTREND ENGINEERING CORP30 citations89
US7695239B2Apr 13, 2010
End effector gripper arms having corner grippers which reorient reticle during transfer
FORTREND ENGINEERING CORP15 citations82
US6193459B1Feb 27, 2001
Integrated wafer pod-load/unload and mass-transfer system
FORTREND ENGINEERING CORP14 citations72
US6086323AJul 11, 2000
Method for supplying wafers to an IC manufacturing process
FORTREND ENGINEERING CORP12 citations71
US6610993B2Aug 26, 2003
Load port door assembly with integrated wafer mapper
FORTREND ENGINEERING CORP12 citations69
US7318697B2Jan 15, 2008
Universal reticle transfer system
FORTREND ENGINEERING CORP8 citations64
US6239963B1May 29, 2001
Wafer support with electrostatic discharge bus
FORTREND ENGINEERING CORP6 citations54