Assignee
FRANKEN WALTER
DE·1 granted patent·3 pending applications·3 citations·filing 2005–2008
Top patents by PatentIndex Score
4 records- 0171US8308867B2Device for the temperature control of the surface temperatures of substrates in a CVD reactorFRANKEN WALTER·Filed 2008·Granted Nov 13, 2012·3 cites·12 claims
- 0246US2009183682A1Source container of a vpe reactorFRANKEN WALTER·Filed 2007·Application pending·0 cites
- 0345US2008251020A1Cvd-Reactor with Slidingly Mounted Susceptor HolderFRANKEN WALTER·Filed 2006·Application pending·0 cites
- 0434US2006124055A1Mask-retaining deviceFRANKEN WALTER·Filed 2005·Application pending·0 cites
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