Assignee
FREIMANN ROLF
DE5 patents
Top patents by PatentIndex Score
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Projection exposure system and use thereof
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Projection illumination system
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Optical imaging device with image defect determination
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Projection exposure tool for microlithography with a measuring apparatus and method for measuring an irradiation strength distribution
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US8593642B2Nov 26, 2013
Method of measuring a shape of an optical surface based on computationally combined surface region measurements and interferometric measuring device
FREIMANN ROLF2 citations57