Assignee
FRIJNS OLAV WALDEMAR VLADIMIR
NL·2 granted patents·8 citations·filing 2006–2009
Top patents by PatentIndex Score
2 records- 0172US8736806B2Lithographic apparatus, a radiation system, a device manufacturing method and a radiation generating methodFRIJNS OLAV WALDEMAR VLADIMIR·Filed 2009·Granted May 27, 2014·4 cites·12 claims
- 0266US8766212B2Correction of spatial instability of an EUV source by laser beam steeringFRIJNS OLAV WALDEMAR VLADIMIR·Filed 2006·Granted Jul 1, 2014·4 cites·20 claims
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