Assignee
FSI CORP
16 patents
Top patents by PatentIndex Score
US4132567AJan 2, 1979
Apparatus for and method of cleaning and removing static charges from substrates
FSI CORP202 citations97
US4749440AJun 7, 1988
Gaseous process and apparatus for removing films from substrates
FSI CORP633 citations96
US4699298AOct 13, 1987
Bung connection
FSI CORP131 citations95
US4286541ASep 1, 1981
Applying photoresist onto silicon wafers
FSI CORP77 citations95
US4197000AApr 8, 1980
Positive developing method and apparatus
FSI CORP104 citations95
US4609575ASep 2, 1986
Method of apparatus for applying chemicals to substrates in an acid processing system
FSI CORP61 citations93
US4682615AJul 28, 1987
Rinsing in acid processing of substrates
FSI CORP60 citations91
US4816081AMar 28, 1989
Apparatus and process for static drying of substrates
FSI CORP70 citations90
US4801335AJan 31, 1989
Rinsing in acid processing of substrates
FSI CORP26 citations87
US4682614AJul 28, 1987
Wafer processing machine
FSI CORP34 citations87
US4664133AMay 12, 1987
Wafer processing machine
FSI CORP53 citations87
US4694852ASep 22, 1987
Flow regulating valve for controlling the flow of corrosive fluids
FSI CORP12 citations74
US4815630AMar 28, 1989
Fluid tight cover seal
FSI CORP7 citations70
US4691722ASep 8, 1987
Bowl for liquid spray processing machine
FSI CORP19 citations70
US4595222AJun 17, 1986
Carrier handle
FSI CORP15 citations69
USD286081SOct 7, 1986
Combined high intensity light and holder for silicon wafers or similar articles
FSI CORP3 citations45