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US5716495AFeb 10, 1998
Cleaning method
FSI INT120 citations97
US5534107AJul 9, 1996
UV-enhanced dry stripping of silicon nitride films
FSI INT114 citations97
US5580421ADec 3, 1996
Apparatus for surface conditioning
FSI INT250 citations95
US5782986AJul 21, 1998
Process for metals removal using beta-diketone or beta-ketoimine ligand forming compounds
FSI INT44 citations92
US6099272AAug 8, 2000
Peristaltic pump with flow control
FSI INT27 citations88
US5635102AJun 3, 1997
Highly selective silicon oxide etching method
FSI INT36 citations86
US5567332AOct 22, 1996
Micro-machine manufacturing process
FSI INT30 citations86