Assignee
FSI INT INC
US91 patents
Top patents by PatentIndex Score
US5971368AOct 26, 1999
System to increase the quantity of dissolved gas in a liquid and to maintain the increased quantity of dissolved gas in the liquid until utilized
FSI INT INC121 citations98
US6884066B2Apr 26, 2005
Thermal process station with heated lid
FSI INT INC553 citations97
US6308776B1Oct 30, 2001
Temperature control apparatus with recirculated coolant
FSI INT INC156 citations97
US6124211ASep 26, 2000
Cleaning method
FSI INT INC89 citations97
US4900395AFeb 13, 1990
HF gas etching of wafers in an acid processor
FSI INT INC332 citations97
US6694224B2Feb 17, 2004
Control of robotic systems
FSI INT INC52 citations95
US6648307B2Nov 18, 2003
Method to increase the quantity of dissolved gas in a liquid and to maintain the increased quantity of dissolved gas in the liquid until utilized
FSI INT INC50 citations95
US6639189B2Oct 28, 2003
Heating member for combination heating and chilling apparatus, and methods
FSI INT INC97 citations95
US6299724B1Oct 9, 2001
Direct vapor delivery of enabling chemical for enhanced HF etch process performance
FSI INT INC75 citations95
US6080531AJun 27, 2000
Organic removal process
FSI INT INC92 citations95
US6015503AJan 18, 2000
Method and apparatus for surface conditioning
FSI INT INC89 citations95
US5961732AOct 5, 1999
Treating substrates by producing and controlling a cryogenic aerosol
FSI INT INC92 citations95
US5924794AJul 20, 1999
Chemical blending system with titrator control
FSI INT INC91 citations95
US5418382AMay 23, 1995
Substrate location and detection apparatus
FSI INT INC473 citations95
US7025831B1Apr 11, 2006
Apparatus for surface conditioning
FSI INT INC57 citations94
US6307184B1Oct 23, 2001
Thermal processing chamber for heating and cooling wafer-like objects
FSI INT INC71 citations94
US6072163AJun 6, 2000
Combination bake/chill apparatus incorporating low thermal mass, thermally conductive bakeplate
FSI INT INC692 citations94
US5810942ASep 22, 1998
Aerodynamic aerosol chamber
FSI INT INC63 citations94
US5169408ADec 8, 1992
Apparatus for wafer processing with in situ rinse
FSI INT INC201 citations94
US4857142AAug 15, 1989
Method and apparatus for controlling simultaneous etching of front and back sides of wafers
FSI INT INC72 citations94
US6681781B2Jan 27, 2004
Methods for cleaning microelectronic substrates using ultradilute cleaning liquids
FSI INT INC51 citations93
US6529686B2Mar 4, 2003
Heating member for combination heating and chilling apparatus, and methods
FSI INT INC50 citations93
US6065481AMay 23, 2000
Direct vapor delivery of enabling chemical for enhanced HF etch process performance
FSI INT INC100 citations93
US5522660AJun 4, 1996
Apparatus for blending and controlling the concentration of a liquid chemical in a diluent liquid
FSI INT INC136 citations93
US6488271B1Dec 3, 2002
Method to increase the quantity of dissolved gas in a liquid and to maintain the increased quantity of dissolved gas in the liquid until utilized
FSI INT INC22 citations92
US6406551B1Jun 18, 2002
Method for treating a substrate with heat sensitive agents
FSI INT INC42 citations92
US6274506B1Aug 14, 2001
Apparatus and method for dispensing processing fluid toward a substrate surface
FSI INT INC39 citations92
US5431700AJul 11, 1995
Vertical multi-process bake/chill apparatus
FSI INT INC89 citations92
US5293893AMar 15, 1994
Empty drum detecting apparatus
FSI INT INC34 citations92
US6979165B2Dec 27, 2005
Reduced footprint tool for automated processing of microelectronic substrates
FSI INT INC44 citations91
US5632866AMay 27, 1997
Point-of-use recycling of wafer cleaning substances
FSI INT INC26 citations91
US7819984B2Oct 26, 2010
Process for treatment of substrates with water vapor or steam
FSI INT INC17 citations90
US7476616B2Jan 13, 2009
Reagent activator for electroless plating
FSI INT INC17 citations90
US6423947B2Jul 23, 2002
Thermal processing chamber for heating and cooling wafer-like objects
FSI INT INC27 citations90
US6383724B1May 7, 2002
Organic removal process
FSI INT INC19 citations90
US6251195B1Jun 26, 2001
Method for transferring a microelectronic device to and from a processing chamber
FSI INT INC43 citations90
US6221781B1Apr 24, 2001
Combined process chamber with multi-positionable pedestal
FSI INT INC73 citations90
US6221168B1Apr 24, 2001
HF/IPA based process for removing undesired oxides form a substrate
FSI INT INC43 citations90
US5922219AJul 13, 1999
UV/halogen treatment for dry oxide etching
FSI INT INC22 citations90
US5861064AJan 19, 1999
Process for enhanced photoresist removal in conjunction with various methods and chemistries
FSI INT INC40 citations90
US5017236AMay 21, 1991
High frequency sonic substrate processing module
FSI INT INC42 citations89
US4874014AOct 17, 1989
Flow control manifold
FSI INT INC57 citations89
US7364625B2Apr 29, 2008
Rinsing processes and equipment
FSI INT INC31 citations88
US6996456B2Feb 7, 2006
Robot with tactile sensor device
FSI INT INC86 citations88
US6835667B2Dec 28, 2004
Method for etching high-k films in solutions comprising dilute fluoride species
FSI INT INC24 citations88
US6822413B2Nov 23, 2004
Systems and methods incorporating an end effector with a rotatable and/or pivotable body and/or an optical sensor having a light path that extends along a length of the end effector
FSI INT INC43 citations88
US6599560B1Jul 29, 2003
Liquid coating device with barometric pressure compensation
FSI INT INC22 citations88
US6036786AMar 14, 2000
Eliminating stiction with the use of cryogenic aerosol
FSI INT INC24 citations88
US5458724AOct 17, 1995
Etch chamber with gas dispersing membrane
FSI INT INC37 citations88
US5942037AAug 24, 1999
Rotatable and translatable spray nozzle
FSI INT INC45 citations87
Showing the top 50 of 91 patents by PatentIndex Score.