Assignee
FU PENG-FEI
US9 patents
Top patents by PatentIndex Score
US8293354B2Oct 23, 2012
UV curable silsesquioxane resins for nanoprint lithography
FU PENG-FEI20 citations92
US9023433B2May 5, 2015
Silsesquioxane resins and method of using them to form an antireflective coating
FU PENG-FEI7 citations83
US8809482B2Aug 19, 2014
Silsesquioxane resins
FU PENG-FEI7 citations79
US8728335B2May 20, 2014
Method and materials for double patterning
FU PENG-FEI7 citations79
US8263312B2Sep 11, 2012
Antireflective coating material
FU PENG-FEI5 citations62
US8653217B2Feb 18, 2014
Method for forming anti-reflective coating
FU PENG-FEI3 citations61
US8241707B2Aug 14, 2012
Silsesquioxane resins
FU PENG-FEI0 citations51
US9086626B2Jul 21, 2015
Photo-patternable and developable silsesquioxane resins for use in device fabrication
FU PENG-FEI1 citations46
US8507179B2Aug 13, 2013
Switchable antireflective coatings
FU PENG-FEI0 citations34