Assignee
FUJIFILM PLANAR SOLUTIONS LLC
US·14 granted patents·2 pending applications·30 citations·filing 2012–2018
Top patents by PatentIndex Score
16 records- 0192US9558959B2Polishing compositions and methods for selectively polishing silicon nitride over silicon oxide filmsFUJIFILM PLANAR SOLUTIONS LLC·Filed 2015·Granted Jan 31, 2017·11 cites·24 claims
- 0286US9583359B2Polishing compositions and methods for selectively polishing silicon nitride over silicon oxide filmsFUJIFILM PLANAR SOLUTIONS LLC·Filed 2014·Granted Feb 28, 2017·7 cites·20 claims
- 0385US9735031B2Polishing compositions and methods for polishing cobalt filmsFUJIFILM PLANAR SOLUTIONS LLC·Filed 2015·Granted Aug 15, 2017·4 cites·17 claims
- 0481US9735030B2Polishing compositions and methods for polishing cobalt filmsFUJIFILM PLANAR SOLUTIONS LLC·Filed 2014·Granted Aug 15, 2017·4 cites·14 claims
- 0577US10676646B2Chemical mechanical polishing slurry for cobalt applicationsFUJIFILM PLANAR SOLUTIONS LLC·Filed 2018·Granted Jun 9, 2020·1 cites·17 claims
- 0677US10106705B1Polishing compositions and methods of use thereofFUJIFILM PLANAR SOLUTIONS LLC·Filed 2017·Granted Oct 23, 2018·2 cites·31 claims
- 0773US10159949B2Advanced fluid processing methods and systemsFUJIFILM PLANAR SOLUTIONS LLC·Filed 2017·Granted Dec 25, 2018·1 cites·40 claims
- 0858US8742130B2Hydrate forms of 1,2,4-triazole, processes for manufacture thereof, and compositions thereofFUJIFILM PLANAR SOLUTIONS LLC·Filed 2012·Granted Jun 3, 2014·0 cites·8 claims
- 0955US10167415B2Reduction in large particle counts in polishing slurriesFUJIFILM PLANAR SOLUTIONS LLC·Filed 2017·Granted Jan 1, 2019·0 cites·17 claims
- 1055US9914852B2Reduction in large particle counts in polishing slurriesFUJIFILM PLANAR SOLUTIONS LLC·Filed 2014·Granted Mar 13, 2018·0 cites·6 claims
- 1154US8771540B2Highly dilutable polishing concentrates and slurriesFUJIFILM PLANAR SOLUTIONS LLC·Filed 2013·Granted Jul 8, 2014·0 cites·14 claims
- 1252US2018187048A1Reduction in large particle counts in polishing slurriesFUJIFILM PLANAR SOLUTIONS LLC·Filed 2018·Application pending·0 cites
- 1351US2014238441A1Cleaning method and systemFUJIFILM PLANAR SOLUTIONS LLC·Filed 2014·Application pending·0 cites
- 1449US10711159B2Polishing compositionsFUJIFILM PLANAR SOLUTIONS LLC·Filed 2017·Granted Jul 14, 2020·0 cites·15 claims
- 1548US9190286B2Composition for advanced node front-and-back-end of line chemical mechanical polishingFUJIFILM PLANAR SOLUTIONS LLC·Filed 2015·Granted Nov 17, 2015·0 cites·18 claims
- 1643US10364373B2Elevated temperature CMP compositions and methods for use thereofFUJIFILM PLANAR SOLUTIONS LLC·Filed 2017·Granted Jul 30, 2019·0 cites·12 claims
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