P

Assignee

FUJIMOTO MASASHI

JP2 patents

Top patents by PatentIndex Score

US8617797B2Dec 31, 2013

Pattern forming method, semiconductor device manufacturing method and phase shift photomask having dummy gate patterns

FUJIMOTO MASASHI0 citations47
US8192919B2Jun 5, 2012

Pattern forming method, semiconductor device manufacturing method and phase shift photomask having dummy gate patterns

FUJIMOTO MASASHI0 citations47