Assignee
FUKAO MASATO
JP3 patents
Top patents by PatentIndex Score
US8298340B2Oct 30, 2012
Organic thin film deposition device, organic EL element manufacturing device, and organic thin film deposition method
FUKAO MASATO5 citations57
US8470403B2Jun 25, 2013
Organic thin film deposition device, organic EL element manufacturing device, and organic thin film deposition method
FUKAO MASATO1 citations46
US8226802B2Jul 24, 2012
Thin film forming apparatus, film thickness measuring method and film thickness sensor
FUKAO MASATO0 citations35