Assignee
FUKUHARA KAZUYA
JP·6 granted patents·11 pending applications·33 citations·filing 2006–2012
Top patents by PatentIndex Score
17 records- 0190US8122385B2Mask pattern correcting methodFUKUHARA KAZUYA·Filed 2008·Granted Feb 21, 2012·13 cites·24 claims
- 0289US8778572B2Photomask and pattern forming methodFUKUHARA KAZUYA·Filed 2012·Granted Jul 15, 2014·6 cites·19 claims
- 0380US8293456B2Semiconductor device manufacturing methodFUKUHARA KAZUYA·Filed 2009·Granted Oct 23, 2012·5 cites·7 claims
- 0479US8072601B2Pattern monitor mark and monitoring method suitable for micropatternFUKUHARA KAZUYA·Filed 2008·Granted Dec 6, 2011·7 cites·9 claims
- 0568US8772179B2Pattern forming method, pattern forming apparatus, and method for manufacturing semiconductor deviceFUKUHARA KAZUYA·Filed 2012·Granted Jul 8, 2014·2 cites·16 claims
- 0652US8679731B2Semiconductor device manufacturing methodFUKUHARA KAZUYA·Filed 2012·Granted Mar 25, 2014·0 cites·8 claims
- 0751US2009233189A1Device and method for obtaining exposure correction information, and manufacturing method of semiconductor deviceFUKUHARA KAZUYA·Filed 2009·Application pending·0 cites
- 0850US2009231568A1Method of measuring wavefront error, method of correcting wavefront error, and method of fabricating semiconductor deviceFUKUHARA KAZUYA·Filed 2009·Application pending·0 cites
- 0949US2010144148A1Method for manufacture of semiconductor deviceFUKUHARA KAZUYA·Filed 2009·Application pending·0 cites
- 1048US2009190118A1Exposure apparatus inspection mask, and method of inspecting exposure apparatus using exposure apparatus inspection maskFUKUHARA KAZUYA·Filed 2009·Application pending·0 cites
- 1148US2010136488A1Pattern creation method, semiconductor device manufacturing method, and computer-readable storage mediumFUKUHARA KAZUYA·Filed 2009·Application pending·0 cites
- 1245US2009004581A1Exposure apparatus, exposure method and optical proximity correction methodFUKUHARA KAZUYA·Filed 2007·Application pending·0 cites
- 1344US2007134563A1Photomask and method of manufacturing semiconductor deviceFUKUHARA KAZUYA·Filed 2006·Application pending·0 cites
- 1440US2012206702A1Computer-readable recording medium recording exposing condition determination programFUKUHARA KAZUYA·Filed 2011·Application pending·0 cites
- 1540US2012163699A1Mask determination method, exposure method, and semiconductor device manufacturing methodFUKUHARA KAZUYA·Filed 2011·Application pending·0 cites
- 1637US2010195069A1Exposure method and exposure systemFUKUHARA KAZUYA·Filed 2010·Application pending·0 cites
- 1737US2011032501A1Exposure apparatus, exposure system, and method of manufacturing semiconductor deviceFUKUHARA KAZUYA·Filed 2010·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when FUKUHARA KAZUYA files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →