Assignee
FUNK MERRITT
US4 patents
Top patents by PatentIndex Score
US8816281B2Aug 26, 2014
Ion energy analyzer and methods of manufacturing the same
FUNK MERRITT16 citations92
US9087677B2Jul 21, 2015
Methods of electrical signaling in an ion energy analyzer
FUNK MERRITT8 citations83
US8183062B2May 22, 2012
Creating metal gate structures using Lithography-Etch-Lithography-Etch (LELE) processing sequences
FUNK MERRITT3 citations61
US9151286B2Oct 6, 2015
Processing chamber integrated pressure control
FUNK MERRITT0 citations41