Assignee
FURUTA GAKU
US·5 granted patents·2 pending applications·19 citations·filing 2008–2012
Top patents by PatentIndex Score
7 records- 0190US8877301B2Plasma processing including asymmetrically grounding a susceptorFURUTA GAKU·Filed 2011·Granted Nov 4, 2014·4 cites·18 claims
- 0278US8999847B2a-Si seasoning effect to improve SiN run-to-run uniformityFURUTA GAKU·Filed 2011·Granted Apr 7, 2015·4 cites·17 claims
- 0377US8299466B2Thin film transistors having multiple doped silicon layersFURUTA GAKU·Filed 2010·Granted Oct 30, 2012·6 cites·8 claims
- 0456US9243328B2Susceptor with roll-formed surface and method for making sameFURUTA GAKU·Filed 2009·Granted Jan 26, 2016·0 cites·15 claims
- 0556US2009023241A1Clean rate improvement by pressure controlled remote plasma sourceFURUTA GAKU·Filed 2008·Application pending·0 cites
- 0652US2009255798A1Method to prevent parasitic plasma generation in gas feedthru of large size pecvd chamberFURUTA GAKU·Filed 2008·Application pending·0 cites
- 0745USD713200SSusceptor with heaterFURUTA GAKU·Filed 2012·Granted Sep 16, 2014·5 cites·1 claims
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