Assignee
FURUYA MASAAKI
JP4 patents
Top patents by PatentIndex Score
US8998561B2Apr 7, 2015
Gripping device, transfer device, processing device, and manufacturing method for electronic device
FURUYA MASAAKI12 citations82
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Sheet peeling machine and method for manufacturing display device
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US9330948B2May 3, 2016
Heater unit, fan filter unit, and substrate processing apparatus
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US9199805B2Dec 1, 2015
Processing system and processing method
FURUYA MASAAKI0 citations30