Assignee
GABOR ALLEN H
US·3 granted patents·16 citations·filing 2008–2011
Top patents by PatentIndex Score
3 records- 0191US8455162B2Alignment marks for multi-exposure lithographyGABOR ALLEN H·Filed 2011·Granted Jun 4, 2013·8 cites·15 claims
- 0276US8158334B2Methods for forming a composite pattern including printed resolution assist featuresGABOR ALLEN H·Filed 2008·Granted Apr 17, 2012·6 cites·20 claims
- 0366US9046788B2Method for monitoring focus on an integrated waferGABOR ALLEN H·Filed 2008·Granted Jun 2, 2015·2 cites·21 claims
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