Assignee
GANAPATHISUBRAMANIAN MAHADEVAN
US4 patents
Top patents by PatentIndex Score
US8215946B2Jul 10, 2012
Imprint lithography system and method
GANAPATHISUBRAMANIAN MAHADEVAN24 citations91
US8913230B2Dec 16, 2014
Chucking system with recessed support feature
GANAPATHISUBRAMANIAN MAHADEVAN4 citations71
US8237133B2Aug 7, 2012
Energy sources for curing in an imprint lithography system
GANAPATHISUBRAMANIAN MAHADEVAN6 citations71
US9164375B2Oct 20, 2015
Dual zone template chuck
GANAPATHISUBRAMANIAN MAHADEVAN3 citations61