Assignee
GASONICS INTERNATIONAL
US·6 granted patents·1,126 citations·filing 1996–1997
Top patents by PatentIndex Score
6 records- 0196US5667592AProcess chamber sleeve with ring seals for isolating individual process modules in a common clusterGASONICS INTERNATIONAL·Filed 1996·Granted Sep 16, 1997·638 cites·8 claims
- 0292US5662143AModular gas box systemGASONICS INTERNATIONAL·Filed 1996·Granted Sep 2, 1997·139 cites·9 claims
- 0389US5863170AModular process systemGASONICS INTERNATIONAL·Filed 1996·Granted Jan 26, 1999·129 cites·7 claims
- 0487US5855465ASemiconductor wafer processing carouselGASONICS INTERNATIONAL·Filed 1996·Granted Jan 5, 1999·110 cites·6 claims
- 0586US5914278ABackside etch process chamber and methodGASONICS INTERNATIONAL·Filed 1997·Granted Jun 22, 1999·84 cites·11 claims
- 0672US5814154AShort-coupled-path extender for plasma sourceGASONICS INTERNATIONAL·Filed 1997·Granted Sep 29, 1998·26 cites·8 claims
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