Assignee
GAWASE AKIFUMI
JP·1 granted patent·2 pending applications·2 citations·filing 2011–2012
Top patents by PatentIndex Score
3 records- 0163US8936729B2Planarizing methodGAWASE AKIFUMI·Filed 2012·Granted Jan 20, 2015·2 cites·17 claims
- 0237US2012220195A1Cmp apparatus, polishing pad and cmp methodGAWASE AKIFUMI·Filed 2011·Application pending·0 cites
- 0333US2013095661A1Cmp method, cmp apparatus and method of manufacturing semiconductor deviceGAWASE AKIFUMI·Filed 2012·Application pending·0 cites
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