Assignee
GCA CORP
US40 patents
Top patents by PatentIndex Score
US4567361AJan 28, 1986
Reticle bar code and method and apparatus for reading same
GCA CORP61 citations95
US4616908AOct 14, 1986
Microlithographic system
GCA CORP78 citations94
US4518848AMay 21, 1985
Apparatus for baking resist on semiconductor wafers
GCA CORP74 citations93
US4401131AAug 30, 1983
Apparatus for cleaning semiconductor wafers
GCA CORP95 citations92
US4647172AMar 3, 1987
Resist development method
GCA CORP47 citations91
US4436424AMar 13, 1984
Interferometer using transverse deviation of test beam
GCA CORP27 citations91
US3946200AMar 23, 1976
Proportional temperature controller
GCA CORP118 citations91
US4667415AMay 26, 1987
Microlithographic reticle positioning system
GCA CORP51 citations89
US4436985AMar 13, 1984
Apparatus for heat treating semiconductor wafers
GCA CORP28 citations89
US4315705AFeb 16, 1982
Apparatus for handling and treating wafers
GCA CORP49 citations89
US4640619AFeb 3, 1987
Microlithographic calibration scheme
GCA CORP29 citations88
US4425508AJan 10, 1984
Electron beam lithographic apparatus
GCA CORP76 citations87
US4603466AAug 5, 1986
Wafer chuck
GCA CORP109 citations86
US3973665AAug 10, 1976
Article delivery and transport apparatus for evacuated processing equipment
GCA CORP83 citations86
US4278366AJul 14, 1981
Automatic wafer processing system and method
GCA CORP38 citations85
US4519717AMay 28, 1985
On-stream cloud point analyzer
GCA CORP33 citations83
US4206494AJun 3, 1980
High throughput illuminator
GCA CORP31 citations81
US4528635AJul 9, 1985
Automatic distillation apparatus
GCA CORP23 citations76
US4496423AJan 29, 1985
Gas feed for reactive ion etch system
GCA CORP24 citations75
US4402607ASep 6, 1983
Automatic detector for microscopic dust on large-area, optically unpolished surfaces
GCA CORP26 citations75
US4583856AApr 22, 1986
Resolution system for interferometer
GCA CORP13 citations74
US4320975AMar 23, 1982
Passive smoke plume opacity monitor
GCA CORP10 citations73
US4139333AFeb 13, 1979
Positive displacement flow through fluid pump
GCA CORP14 citations73
US4506005AMar 19, 1985
Method of catalytic etching
GCA CORP14 citations72
US4325077AApr 13, 1982
Automatic wafer alignment system
GCA CORP17 citations71
US3948564AApr 6, 1976
Fluid bearing apparatus and method utilizing selective turntable diverter structure
GCA CORP18 citations70
US4517430AMay 14, 1985
Microwave heating device with constant temperature control of the magnetron
GCA CORP20 citations69
US4323763AApr 6, 1982
Parametric power controller
GCA CORP12 citations67
US4381452AApr 26, 1983
System for measuring trace moisture in a gaseous stream
GCA CORP11 citations66
US4352607AOct 5, 1982
Automatic wafer processing system and method
GCA CORP7 citations66
US4556785ADec 3, 1985
Apparatus for vapor sheathed baking of semiconductor wafers
GCA CORP7 citations65
US4444531AApr 24, 1984
Air track apparatus
GCA CORP15 citations65
US4253111AFeb 24, 1981
Apparatus for bonding leads to semiconductor chips
GCA CORP11 citations62
US4025242AMay 24, 1977
Vacuum pump oiling
GCA CORP2 citations62
US4434217AFeb 28, 1984
Chalcogenide product
GCA CORP5 citations59
US4047627ASep 13, 1977
Mask plate handling method
GCA CORP2 citations59
US4502871AMar 5, 1985
Apparatus and method for separating wax from an entrainer gas
GCA CORP7 citations58
US4095891AJun 20, 1978
On-the-fly photoresist exposure apparatus
GCA CORP8 citations58
US3946252AMar 23, 1976
Integral cycle power controller
GCA CORP4 citations58
US3967127AJun 29, 1976
Sample introducer
GCA CORP5 citations54