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GENERAL PLASMA INC
US5 patents
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US10989343B2Apr 27, 2021
Push-to-connect and pull-to-disconnect quick coupling
GENERAL PLASMA INC4 citations71
US10134557B2Nov 20, 2018
Linear anode layer slit ion source
GENERAL PLASMA INC5 citations71
US11092245B2Aug 17, 2021
Chamber valve
GENERAL PLASMA INC0 citations50
US10273570B2Apr 30, 2019
Rotary magnetron magnet bar and apparatus containing the same for high target utilization
GENERAL PLASMA INC0 citations49
US10811236B2Oct 20, 2020
Magnetic anode for sputter magnetron cathode
GENERAL PLASMA INC0 citations39